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Large volumes of silane and other specialty gases are used as feedstock gases in the semiconductor and other industries. Many of these gases are extremely dangerous. For example, some of them ignite spontaneously on exposure to air, and others can explode without the presence of oxidizing gases such as air. In order to establish methods for the safe handling of these gases, it is necessary to clarify the nature of the hazards and then to determine the conditions required for preventing ignition or explosion. The Institute performs various experiments on the ignition and explosion limits of these gases, clarifies their basic combustion reactions, and then establishes the conditions required to prevent ignition or explosion hazards.
Explosion and ignition hazard of silane-air-nitrogen system Solid line: Lower explosion limit Oblique lines: Region of spontaneous ignition |