Performance Characteristics of an Oxygen Radical Beam Radio-Frequency Source

F. Imai, K. Kunimori, and H. Nozoye
[J. Vac. Sci. Technol., Vol.A13, pp.2508-2512, 1995]

An oxygen radical beam source discharged by radio frequency was newly designed and constructed. Effects of wall materials on the optical emission intensity of the oxygen plasma and the atomic oxygen flux were measured (Fig. 1). The optical emission intensity correlated well with the intensity of the atomic oxygen flux. An atomic oxygen flux as high as 1.4 x 10¹⁶ atoms/(cm²s) was achieved at 50 mm away from an end plate, with nine orifices, of the radical beam source by using a sleeve made of pyrolytic boron nitride in the beam source.

Fig. 1. The relation between oxygen radical flux and wall material of the sleeves. The number of orifices is 9 and the rf power is 450 W.