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XAS Study on the Intermediate Species Formed during the Surface Oxidation of CrN Films

F. Esaka, H. Shimada, M. Imamura, N. Matsubayashi, T. Sato,
A. Nishijima, A. Kawana, H. Ichimura, T. Kikuchi, and K. Furuya
[Journal de Physique IV, Vol.7, pp.1149-1150, 1997]

X-ray absorption spectroscopy (XAS) was applied to the identification of the intermediate species formed during the surface oxidation of CrN films. The N K-edge spectra indicated formation of an intermediate species which gave a feature at 401.4 V. A high resolution XAS spectrum exhibited that the feature at 401.4 eV has the same vibrational fitting as that of gaseous nitrogen molecules.

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