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Metal growth processes of Pd on mica were studied using atomic force microscopy. Hemispherical Pd clusters were formed when a faster deposition rate was applied. The coalescence of Pd clusters was not observed until the surface was filled with Pd clusters having a critical size. By using a slower deposition rate, a morphological change of Pd clusters was observed. It is suggested that these phenomena can be described in terms of the unit surface energy of the clusters.