High Resolution XAS Spectrum of Interstitial Nitrogen Molecules in the Surface Oxide Matrix of TiAIN Film

High resolution X-ray absorption spectroscopy (XAS) has been applied to the analysis of the electronic interaction of interstitial nitrogen molecules with the surface oxide matrix of an oxidized TiAlN film. The N pi^* feature of the interstitial nitrogen molecules has displayed evident vibrational fine structure, on which the full width at half maximum lifetime width (Gamma) and vibrational separation (omega_epsilon) have been calculated. The comparison of the G value with that of gaseous phase nitrogen molecules has shown that the pi^* orbital of the nitrogen molecules has a very weak electronic interaction with the orbitals of the matrix. In addition, the change in the we omega_epsilonvalue has suggested that the N-N bonding of the nitrogen molecules is strengthened due to the stress by the surrounding matrix.