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Takaaki MANABE, Seungwon KIM, Iwao YAMAGUCHI,Wakichi KONDO, Toshiya KUMAGAI and Susumu MIZUTA
J. of NIMC. Vol.4, No.4, pp.153-157(1996)
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Lithium niobate (LiNbO3) thin films were prepared on@Ώ-Al203(sapphire) substrates by dipping-pyrolysis process using Li-2-ethylhexanoate and Nb-naphthenate as starting materials. Amorphous films pyrolyzed at 400 were crystallized by heat treatments at 600 and higher. m110n-oriented LiNbO3 films were obtained on sapphire (110), and epitaxy of these films was confirmed by x-ray pole-figure analysis. In contrast, m100n-oriented LiNbO3 films on sapphire (012), containing a small amount of m012n-oriented grains, were obtained by similar heat treatments. Alignment of LiNbO3(100) // sapphire (012) and LiNbO3(012) // sapphire (012) was discussed on the basis of crystal structures of both materials. Further, the results on the LiNbO3 films with various molar ratios of Li/Nb showed that the effect of Li/Nb ratio on the alignment of LiNbO3 films on sapphire (012) was not so significant, in contrast to that of LiNbO3 films by rf-sputtering. |